Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Three-wave parametric interactions are studied in media exhibiting group-velocity dispersion. Under certain conditions these interactions may be described by the same equations that govern pulse propagation in a two-level resonant system. This analogy suggests the existence of steady-state pulse solutions in the three-wave parametric system. Such solutions are found, and are analogues of pi and two-pi pulses. The variety of solutions in the parametric system is greater than in the resonant case. © 1970, IEEE. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Macromolecules
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IEEE J-STARS