Smoothing of multilayer x-ray mirrors by ion polishing

Eberhard Spiller

doi:10.1063/1.101106

Applied Physics Letters

Paper

01 Dec 1989

Smoothing of multilayer x-ray mirrors by ion polishing

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Abstract

Ion bombardment at grazing angles of incidence is used to smoothen the boundaries within multilayer x-ray mirrors. Increases in the reflectivity by a factor of 2 for soft x rays have been obtained for RhRu-C mirrors with periods of 60 Å.

Conference paper

Imaging performance of a normal incidence x-ray telescope measured at 0.18 kev

J.P. Henry, Eberhard Spiller, et al.

Proceedings of SPIE 1989

Paper

Coherence effects from visible light to X-rays

Eberhard Spiller

Nuclear Inst. and Methods in Physics Research, A

Conference paper

Determination of thickness errors and boundary roughness from the measured performance of a multilayer coating

Eberhard Spiller, Alan E. Rosenbluth

Proceedings of SPIE 1989

Paper

Reflective multilayer coatings for the far uv region

Eberhard Spiller

Applied Optics

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Abstract

Related

Imaging performance of a normal incidence x-ray telescope measured at 0.18 kev

Coherence effects from visible light to X-rays

Determination of thickness errors and boundary roughness from the measured performance of a multilayer coating

Reflective multilayer coatings for the far uv region