Smoothing of multilayer x-ray mirrors by ion polishing

Eberhard Spiller

doi:10.1063/1.101106

Applied Physics Letters

Paper

01 Dec 1989

Smoothing of multilayer x-ray mirrors by ion polishing

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Abstract

Ion bombardment at grazing angles of incidence is used to smoothen the boundaries within multilayer x-ray mirrors. Increases in the reflectivity by a factor of 2 for soft x rays have been obtained for RhRu-C mirrors with periods of 60 Å.

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Abstract

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