Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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We establish a smooth positive extension theorem: Given any closed subset of a finite-dimensional real Euclidean space, a function zero on the closed set can be extended to a function smooth on the whole space and positive on the complement of the closed set. This result was stimulated by nonlinear programming. We give several applications of this result to nonlinear programming. © 1994 Plenum Publishing Corporation.
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