Room Temperature Chemical Polishing of Ge and GaAs

Peter J. Price

Surface Science

I.K. Pour, D.J. Krajnovich, et al.

SPIE Optical Materials for High Average Power Lasers 1992

Surendra B. Anantharaman, Joachim Kohlbrecher, et al.

MRS Fall Meeting 2020

P. Martensson, R.M. Feenstra

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films