P.G. Ganesan, G. Cui, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Relationship between interfacial adhesion and electromigration in Cu metallization
Abstract
The relationship between interfacial adhesion and electromigration in Cu metallization was discussed. The electromigration drift velocity and lifetime in a conventional electromigration was also derived. The results indicated a linear relationship between the electromigration activation energy and the intrinsic work of adhesion.
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