Conference paper
A multilevel copper/low-k/airgap BEOL technology
S.V. Nitta, S. Ponoth, et al.
ADMETA 2007
The relationship between interfacial adhesion and electromigration in Cu metallization was discussed. The electromigration drift velocity and lifetime in a conventional electromigration was also derived. The results indicated a linear relationship between the electromigration activation energy and the intrinsic work of adhesion.
S.V. Nitta, S. Ponoth, et al.
ADMETA 2007
C.-K. Hu, L. Gignac, et al.
JES
C.-K. Hu, L. Gignac, et al.
JES
A. Grill, D. Edelstein, et al.
IITC 2004