Conference paper
Channel cracking in low-k films on patterned multi-layers
X.-H. Liu, T.M. Shaw, et al.
IITC 2004
The identification of linear materials for direct electrodeposition of Cu was discussed. Adhesion, recrystallization, texture and resistivity of the plated film were studied. Results showed a family of metals which allow direct Cu electrodeposition in standard acid plating baths.
X.-H. Liu, T.M. Shaw, et al.
IITC 2004
D. Ugolini, S.P. Kowalczyk, et al.
Journal of Applied Physics
F.J. Himpsel, U.O. Karlsson, et al.
Materials Science and Engineering B
D.D. Gandhi, A.P. Singh, et al.
Journal of Applied Physics