Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Raman scattering and optical absorption measurements have been used to study the structural and electronic properties of a-Sil-xHx films made by homogeneous chemical vapor deposition. The Raman spectra show that the hydrogenated films are more ordered than pure a-Si films. For x ≲0.04 the optical gap E0 correlates with ΔVH-1, the structural order parameter. At higher hydrogen concentrations, however, ΔVH-1 is relatively constant and E0 increases due to alloy rather than structural ordering effects. © 1983.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
J. Tersoff
Applied Surface Science