P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Raman scattering and optical absorption measurements have been used to study the structural and electronic properties of a-Sil-xHx films made by homogeneous chemical vapor deposition. The Raman spectra show that the hydrogenated films are more ordered than pure a-Si films. For x ≲0.04 the optical gap E0 correlates with ΔVH-1, the structural order parameter. At higher hydrogen concentrations, however, ΔVH-1 is relatively constant and E0 increases due to alloy rather than structural ordering effects. © 1983.
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Imran Nasim, Melanie Weber
SCML 2024
A. Gangulee, F.M. D'Heurle
Thin Solid Films
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992