Conference paper
Imaging of oxide and interface charges in SiO2-Si
R. Ludeke, E. Cartier
Microelectronic Engineering
Quantum oscillations arising from interference in over-the-barrier injected electrons crossing a metal-oxide-semiconductor structure were observed for a 2.8 nm SiO2 layer. Model calculations that include image force effects are fitted to the data to obtain a conduction-band mass of mox=(0.63±0.09)m0. The field dependence of the oscillations was used to deduce the polarity and magnitudes of oxide charge induced by the high fluence of electrons injected with the scanning tunneling microscope during spectral acquisitions. © 1998 American Institute of Physics.
R. Ludeke, E. Cartier
Microelectronic Engineering
R. Ludeke
Surface Science
F. Schäffler, R. Ludeke, et al.
Physical Review B
G. Landgren, R. Ludeke, et al.
Journal of Crystal Growth