Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Electrons occupying surface states on the close-packed faces of the noble metals form a two-dimensional (2D) nearly-free electron gas that can be imaged with a scanning tunneling microscope (STM). We find that Fe adatoms strongly scatter metallic surface state electrons, and so are good building blocks for constructing atomic-scale barriers to confine these electrons. The barriers ("quantum corrals") are constructed by individually positioning Fe adatoms using the tip of a cold (4K) STM. Tunneling spectroscopy performed inside of the corrals reveals discrete resonances, consistent with size quantization. A more quantitative understanding is obtained by accounting for the multiple-scattering of the surface state electrons with the corrals' constituent adatoms. This scattering is characterized by a complex phase shift which can be extracted from the electronic density pattern inside a quantum corral. © 1995.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Vladimir Yanovski, Israel A. Wagner, et al.
Ann. Math. Artif. Intell.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007