Ellen J. Yoffa, David Adler
Physical Review B
Paper
Process integration of self-assembled polymer templates into silicon nanofabrication
Abstract
A set of key processes for nanometer-scale pattern transfer using a self-assembled polymer mask was developed and integrated. As a result, a variety of silicon nanostructures were built.
Related
Oliver Schilter, Alain Vaucher, et al.
Digital Discovery
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME