Sung Ho Kim, Oun-Ho Park, et al.
Small
Paper
Process integration of self-assembled polymer templates into silicon nanofabrication
Abstract
A set of key processes for nanometer-scale pattern transfer using a self-assembled polymer mask was developed and integrated. As a result, a variety of silicon nanostructures were built.
Related
John G. Long, Peter C. Searson, et al.
JES
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films