Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Principles for selecting potential infrared nematic liquid crystals are described. Optical and electro-optic properties of two cyanotolanes, 4-n-alkyl-4′-cyanotolanes and three commercial liquid-crystal mixtures were chosen for evaluation. Their applications for modulating infrared radiation are addressed. © 1989 Taylor and Francis Group, LLC.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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