Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Starting with the physics of tunneling transport through a molecule, we describe the principles underlying electrical amplification effects of a (Formula presented) molecule. We discuss in detail the consequences of intramolecular electronic-level repulsion, an effect induced by compression of the molecule, which leads to an exponential variation of the current for a minute compression of the molecule. This detailed understanding underpins the (Formula presented) amplifier. Using a planar configuration and an independent electromechanical grid, a transistor effect results from this repulsion effect. © 1998 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
E. Burstein
Ferroelectrics
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films