R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
No abstract available.
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
A. Reisman, M. Berkenblit, et al.
JES
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010