Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Time-resolved small-angle x-ray scattering studies were performed on symmetric diblock copolymers of polystyrene and poly(methyl methacrylate), P(S-b-MMA). Freeze-dried powders of P(S-b-MMA) having a molecular weight of 8.4×104 were rapidly heated to temperatures above the glass transition temperature to initiate the microphase separation. The microphase separation process was found to consist of a rapid, local microphase separation followed by a long-term coarsening process. The period characterizing the lamellar microphase separated structure was found to increase initiallv and then saturate at longer times. These results are discussed in light of recent theoretical developments. © 1994 Steinkopff-Verlag.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Imran Nasim, Melanie Weber
SCML 2024
Peter J. Price
Surface Science
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983