Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper studies several geometric aspects of the Poisson and Gaussian random fields approximating Burgers k−2 and Kolmogorov [Formula ommited] homogeneous turbulence. In particular, simulated sample scalar iso-surfaces (e.g. surfaces of constant temperature or concentration) are exhibited, and their relative degrees of wiggliness are shown to be best characterized by saying that the corresponding fractal dimensions are respectively equal to 3−½ and [Formula ommited]. © 1975, Cambridge University Press. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
M.A. Lutz, R.M. Feenstra, et al.
Surface Science
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989