Conference paper
Characterization of a next generation step-and-scan system
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SPIE Advanced Lithography 1998
Combinatorial optimization can be described as the problem of finding a feasible subset that maximizes a objective function. The paper discusses combinatorial optimization problems, where for each dimension the set of feasible subsets is fixed. It is demonstrated that in some cases fixing the structure makes the problem easier, whereas in general the problem remains NP-complete.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
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SPIE Photomask Technology + EUV Lithography 2011
Salvatore Certo, Anh Pham, et al.
Quantum Machine Intelligence