Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The problem of collecting m copies of a set of n objects by random selection is studied. Previous efforts on this problem have assumed that the probability of selecting a particular object of the set at any trial is 1 n. In this paper it is assumed that the probability of selecting the ith object at any trial is given by pi = ∝ (i - 1) n i n f(u)du. The mean and the variance of the number of trials necessary to complete the collection are computed along with their asymptotic behavior as n → ∞. © 1963.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Imran Nasim, Melanie Weber
SCML 2024
John S. Lew
Mathematical Biosciences
A. Grill, B.S. Meyerson, et al.
Proceedings of SPIE 1989