Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
A simple method is shown for computing the Airy stress function for two-dimensional problems. The method is applied to a simple mechanics example and to large computer-generated atomic models whose properties are independent of some coordinate z. The method has recently proved useful for analyzing topological defects in computer-generated models of amorphous solids. © 1981.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Kenneth L. Clarkson, K. Georg Hampel, et al.
VTC Spring 2007
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Ruixiong Tian, Zhe Xiang, et al.
Qinghua Daxue Xuebao/Journal of Tsinghua University