Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The string replacement (SR) method was recently proposed as a method for exponentiation ae in a group G. The canonical k-SR method operates by replacing a run of i ones in a binary exponent, O < i ≤ k, with i - 1 zeroes followed by the single digit b = 2i - 1. After recoding, it was shown in [5] that the expected weight of e tends to n/4 for n-bit exponents. In this paper we show that the canonical k-SR recoding process can be described as a regular language and then use generating functions to derive the exact probability distribution of recoded exponent weights. We also show that the canonical 2-SR recoding produces weight distributions very similar to (optimal) signed-digit recodings, but no group inversions are required.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Zhihua Xiong, Yixin Xu, et al.
International Journal of Modelling, Identification and Control
Kenneth L. Clarkson, K. Georg Hampel, et al.
VTC Spring 2007
Daniel J. Costello Jr., Pierre R. Chevillat, et al.
ISIT 1997