Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
We study an approximation method of stationary characters of a two-dimensional Markov chain via the Stein method. For this purpose, innovative methods are developed to estimate the moments of the Markov chain, as well as the solution to the Poisson equation with a partial differential operator.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Amir Ali Ahmadi, Raphaël M. Jungers, et al.
SICON
F. Odeh, I. Tadjbakhsh
Archive for Rational Mechanics and Analysis
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994