Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
We prove there exist a finite set of (real) matrices of order n with positive determinant that, collectively, "see" all such matrices. © 1985.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
T. Graham, A. Afzali, et al.
Microlithography 2000
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989