Conference paper
New polysilicon disposable sidewall process for sub-50 nm CMOS
K.L. Lee, D. Boyd, et al.
ESSDERC 2001
The paper on which this article is based is reprinted with permission from the Institute of Environmental Sciences Proceedings, Annual Technical Meeting, 1991. The authors discuss the results of work undertaken to compare several different types of particle counters, having different flow rates and particle size detection abilities, when tested in a small cleanroom under both normal and reduced-flow operating conditions.
K.L. Lee, D. Boyd, et al.
ESSDERC 2001
R.J. Miller, Douglas W. Cooper
Annual Technical Meeting of Institute of Environmental Sciences 1989
R.J. Miller, Douglas W. Cooper, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Douglas W. Cooper
Journal of Environmental Sciences