Conference paper
New polysilicon disposable sidewall process for sub-50 nm CMOS
K.L. Lee, D. Boyd, et al.
ESSDERC 2001
The paper on which this article is based is reprinted with permission from the Institute of Environmental Sciences Proceedings, Annual Technical Meeting, 1991. The authors discuss the results of work undertaken to compare several different types of particle counters, having different flow rates and particle size detection abilities, when tested in a small cleanroom under both normal and reduced-flow operating conditions.
K.L. Lee, D. Boyd, et al.
ESSDERC 2001
Douglas W. Cooper, H.L. Wolfe, et al.
Annual Technical Meeting of Institute of Environmental Sciences 1989
Masahide Terazima, Noboru Hirota, et al.
Pure and Applied Chemistry
Douglas W. Cooper
Journal of Aerosol Science