R.J. Miller, Douglas W. Cooper
Annual Technical Meeting of Institute of Environmental Sciences 1989
The paper on which this article is based is reprinted with permission from the Institute of Environmental Sciences Proceedings, Annual Technical Meeting, 1991. The authors discuss the results of work undertaken to compare several different types of particle counters, having different flow rates and particle size detection abilities, when tested in a small cleanroom under both normal and reduced-flow operating conditions.
R.J. Miller, Douglas W. Cooper
Annual Technical Meeting of Institute of Environmental Sciences 1989
Chung-Hsun Lin, R. Kambhampati, et al.
VLSI Technology 2012
Tenko Yamashita, Veeraraghvan S. Basker, et al.
VLSI Technology 2011
Douglas W. Cooper
Journal of the IES