E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Detection of short-range interactions in combination with tunneling microscopy provides a means for characterizing the chemical nature of surfaces. Results are presented that demonstrate that carbon adsorbed on a rough, polycrystalline Ir surface can be detected on an atomic level. © 1994 The American Physical Society.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
P. Alnot, D.J. Auerbach, et al.
Surface Science
T.N. Morgan
Semiconductor Science and Technology
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering