Integration compatible porous SiCOH dielectrics from 45 to 22 nm
S. Gates, A. Grill, et al.
ADMETA 2008
The gate bias dependence of the field-effect mobility in pentacene- based insulated gate field-effect transistors (IGFETs) was interpreted on the basis of the interaction of charge carriers with localized trap levels in the band gap. This understanding was used to design and fabricate IGFETs with mobility of more than 0.3 square centimeter per volt per second and current modulation of 105, with the use of amorphous metal oxide gate insulators. These values were obtained at operating voltage ranges as low as 5 volts, which are much smaller than previously reported results. An all-room- temperature fabrication process sequence was used, which enabled the demonstration of high-performance organic IGFETs on transparent plastic substrates, at low operating voltages for organic devices.
S. Gates, A. Grill, et al.
ADMETA 2008
D.B. Mitzi, C. Dimitrakopoulos, et al.
Chemistry of Materials
S. Sankaran, S. Arai, et al.
IEDM 2006
A.C. Callegari, B.K. Furman, et al.
ESSDERC 1992