Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020
We have investigated the structure of molecular-beam-epitaxy-grown CuO thin films on MgO substrates using reflection high-energy electron diffraction, x-ray diffraction, and high-resolution electron microscopy (HREM). The results show that CuO(111) planes grow parallel to (001)MgO planes. Three main in-plane epitaxial relations are observed: [1̄10]CuO[110]MgO, [01̄1]Cu[110]MgO, and [101̄]CuO[100]MgO. Close to the interface, strains related to the matching conditions imposed by the substrate affect both symmetry and lattice constants of the monoclinic CuO structure. Cross-sectional HREM shows that the exact epitaxial orientation is only partially preserved as the film thickness increases. The loss of in-plane epitaxy is affected by a poor matching of lattice spacings and by misorientations between planes of both crystals, which join at the interface. We investigate the relative orientations between both crystals on the basis of a mapping technique developed for the epitaxy of the axial-commensurate system. The results show that all the experimentally observed epitaxial orientations are successfully predicted by this technique. © 1992 The American Physical Society.
Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals