Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Miniaturized arrays of immobilized oligonucleotide probes have immense potential as tools for the rapid analysis of DNA sequences. There are a variety of techniques that can be used to fabricate these arrays including robotic spotting, ink-jet printing, and photolithographic patterning. In this report we will provide an overview of microarray technology and describe recent efforts at developing photoresist based techniques for array fabrication.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Reisman, M. Berkenblit, et al.
JES
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Robert W. Keyes
Physical Review B