E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Paper
Lithographic image simulations
Abstract
Lithographic aerial images have been studied by digital image simulation. The aspects considered include the variation of numerical aperture, defocus, aberrations, source size, source shape, and source centration. © 1985.
Related
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
Shiyi Chen, Daniel Martínez, et al.
Physics of Fluids
J.K. Gimzewski, T.A. Jung, et al.
Surface Science