Fernando Marianno, Wang Zhou, et al.
INFORMS 2021
Paper
Lithographic image simulations
Abstract
Lithographic aerial images have been studied by digital image simulation. The aspects considered include the variation of numerical aperture, defocus, aberrations, source size, source shape, and source centration. © 1985.
Related
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Eloisa Bentivegna
Big Data 2022
Ellen J. Yoffa, David Adler
Physical Review B