Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
A unification algorithm is described which tests a set of expressions for unifiability and which requires time and space which are only linear in the size of the input. © 1978.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Andrew Skumanich
SPIE Optics Quebec 1993
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Charles A Micchelli
Journal of Approximation Theory