Laser-enhanced etching of polyimide films for microelectronics
P.A. Moskowitz, D.R. Vigliotti, et al.
CLEO 1983
We report new findings that relate to rapid maskless laser etching of steel and stainless steel in neutral solutions of sodium chloride, sodium nitrate, and potassium sulfate. Etch rates have been determined as a function of laser power, laser on-time, and solution concentration. The morphology of laser-etched holes obtained in these solutions was compared with holes obtained in pure water. Results indicate that some controlled melting occurs under certain laser conditions in addition to the metal dissolution process induced by the locally intense heat of the laser beam.
P.A. Moskowitz, D.R. Vigliotti, et al.
CLEO 1983
L. Romankiw
AESF Annual Technical Conference 1990
P. Kritzer, W. Diel, et al.
Werkstoffe und Korrosion
M. Datta, R.V. Shenoy, et al.
Journal of Manufacturing Science and Engineering, Transactions of the ASME