W.D. Hinsberg, F.A. Houle, et al.
Microlithography 2000
Paper
Laser chemical vapor deposition of copper
Abstract
The first laser-induced deposition of copper has been demonstrated using a volatile copper coordination complex. The technique is characterized by reasonable rates and by the high quality of copper produced.
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F.A. Houle, W.D. Hinsberg, et al.
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