Keith A. Jenkins, P. Agnello, et al.
Applied Physics Letters
Paper
Ion Microbeam Radiation System
Abstract
An ion microbeam radiation test system has been built for studying radiation-induced charge collection and single event upsets in advanced semiconductor circuits. With this system, it is possible to direct an ion beam of diameter as small as 1 p.m onto a circuit or test structure with a placement accuracy of 1 μm. The components of the system, and its operation, are described. Applications are described which demonstrate the capabilities of the system. © 1993 IEEE
Related
Keith A. Jenkins, A.P. Jose, et al.
ICICDT 2008
Keith A. Jenkins, R.L. Franch
IEEE International SOI Conference 2003
Conference paper
An ultra-low thermal-budget SiGe-base bipolar technology
J.N. Burghartz, D.A. Grützmacher, et al.
VLSI Technology 1993