Isotropic treatment of EMF effects in advanced photomasks
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
We present a class of integral equation methods for the solution of biharmonic boundary value problems, with applications to two-dimensional Stokes flow and Isotropie elasticity. The domains may be multiply-connected and finite, infinite or semi-infinite in extent. Our analytic formulation is based on complex variables, and our fast multipole-based iterative solution procedure requires O(N) operations, where N is the number of nodes in the discretization of the boundary. The performance of the methods is illustrated with several large-scale numerical examples. © 1996 Academic Press, Inc.
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
A.R. Conn, Nick Gould, et al.
Mathematics of Computation
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000