E. Bassous, A.C. Lamberti
Microelectronic Engineering
Ink jet printing nozzle arrays in the form of truncated pyramidal holes anisotropically etched into a silicon substrate have been fabricated. Eight-nozzle arrays dixplay excellent performance characteristics with regard to uniformity of direction (<± 1mra), velocity (<± 10 cm/sec) at 1000-3000 cm/sec), and drop formation.
E. Bassous, A.C. Lamberti
Microelectronic Engineering
E. Bassous, M. Scheuermann, et al.
IEDM 1991
L. Kuhn, P.F. Heidrich, et al.
Applied Physics Letters
Z.A. Weinberg, G.W. Rubloff, et al.
Physical Review B