M. Hargrove, S.W. Crowder, et al.
IEDM 1998
No abstract available.
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Michiel Sprik
Journal of Physics Condensed Matter
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010