William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
R. Ghez, J.S. Lew
Journal of Crystal Growth
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter