Conference paper
Low thermal budget antimony/phosphorus NMOS technology for CMOS
D.L. Harame, E. Ganin, et al.
IEDM 1991
No abstract available.
D.L. Harame, E. Ganin, et al.
IEDM 1991
K. Ismail, M. Arafa, et al.
Applied Physics Letters
B.S. Meyerson, M.L. Yu
International Conference on Chemical Vapor Deposition 1983
J.Y.-C. Sun, J.H. Comfort, et al.
VLSI-TSA 1991