Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A least-squares parameter fitting procedure is used in conjunction with one-dimensional (1D) and two-dimensional (2D) formulations of the Preisach formalism. The model can use any operator from a selection of 1D and 2D hysteresis operators appropriate for the modeling of hysteresis in ferromagnets, and shape memory alloys. The performance of the hysteresis operators is evaluated, and their applicability is discussed. The model is applied to experimental data from ferromagnetic samples, and shape memory alloys. The results suggest that the proposed approach can be a useful and adjustable tool in the modeling of hysteresis in various systems regardless of the underlying physical mechanism. © 2002 Elsevier Science Ltd. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
P.C. Pattnaik, D.M. Newns
Physical Review B