Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The adhesion of laminated glass fiber reinforced Teflon® PFA to gold was studied. The results of adhesion testing performed by 90° peeling showed a strong dependency of gold/PFA adhesion on the lamination temperature. The possibility of chemical reaction at the gold/PFA interface is discussed. © 1987 VNU Science Press.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
M. Hargrove, S.W. Crowder, et al.
IEDM 1998