Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The dielectric response of thin aromatic polyimide films with thicknesses ranging from 400 to 3×104 has been measured in the frequency range 104-109 Hz. The results show the presence of two components of dielectric polarization. One of these components exhibits a frequency dependence of the ''universal'' type ωn-1 with n=1.0 within experimental error, independent of film thickness, and is attributed to hopping electrons generated from excitation of a charge-transfer complex, followed by charge separation. The other component is characterized by a very low dielectric loss and is attributed to the π-electron response of the dielectric lattice. The results indicate that film morphology plays an important role in determining the magnitude of the dielectric loss in the films, but does not affect its frequency dependence. © 1993 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Mark W. Dowley
Solid State Communications
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001