Experimental determination of the strain transfer across a flexible intermediate layer in thin-film structures

Paper

01 Jan 1992

Abstract

No abstract available.

Paper

J.C. Marinace

JES

Paper

Sung Ho Kim, Oun-Ho Park, et al.

Small

Paper

Ranulfo Allen, John Baglin, et al.

J. Photopolym. Sci. Tech.

Conference paper

Joy Y. Cheng, Daniel P. Sanders, et al.

SPIE Advanced Lithography 2008