Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A new model for the laser-irradiated Si(111)-'(1×1)' surface recently proposed by Jones and Holland is compared with ion scattering results. The model is shown to be inconsistent with these data. The Si(111)-'(1×1)' surface may be described as a disordered (7×7) surface. © 1985.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ronald Troutman
Synthetic Metals
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry