Enhancement of the reflectivity of multilayer x-ray mirrors by ion polishing

The performance of multilayer x-ray mirrors is improved by smoothing the boundaries within the multilayer stack with ion bombardment at grazing angles of incidence. The process is applied to Co-C and to RhRu-C mirrors for normal incidence telescopes at λ = 635 and 114 Å, and the reflectivity is increased by a factor of 2 in both cases. Accumulation of roughness during deposition is eliminated. An estimate of the presently achievable reflectivity for normal incidence mirrors in the λ = 44 to 120 Å wavelength range is given. © 1990 Society of Photo-Optical Instrumentation Engineers.