E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
We adopted the method of direct inversion in the iterative subspace (DIIS) to plane-wave-based electronic structure calculations. We show that with simple modifications based on the idea of preconditioning, the DIIS method is very efficient and robust. A discussion of the merits of the new method relative to other approaches is also given. © 1994.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano