Electrical Properties of AI/Ti Contact Metallurgy for VLSI Applications

P. Alnot, D.J. Auerbach, et al.

Surface Science

Michael Ray, Yves C. Martin

Proceedings of SPIE - The International Society for Optical Engineering

Mitsuru Ueda, Hideharu Mori, et al.

Journal of Polymer Science Part A: Polymer Chemistry

M.A. Lutz, R.M. Feenstra, et al.

Surface Science