Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The uniaxial (basal plane) stress dependence of the charge-density wave ordering transformations in 2 H-TaSe2 are calculated from the recently reported elastic behavior and new measurements of the specific heat. Estimates of the expansivity behavior at these transitions are also given. © 1976 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Frank Stem
C R C Critical Reviews in Solid State Sciences
M. Hargrove, S.W. Crowder, et al.
IEDM 1998