Conference paper
Batch-fabricated milli-actuators
L.-S. Fan, L.H. Lane, et al.
MEMS 1993
No abstract available.
L.-S. Fan, L.H. Lane, et al.
MEMS 1993
V. Raman, T.C. Reiley
Metallurgical Transactions A
V. Raman, T.C. Reiley
Journal of Materials Science Letters
V. Raman, T.C. Reiley
Journal of Materials Science Letters