Conference paper
Batch-fabricated milli-actuators
L.-S. Fan, L.H. Lane, et al.
MEMS 1993
No abstract available.
L.-S. Fan, L.H. Lane, et al.
MEMS 1993
T.C. Reiley, L.-S. Fan, et al.
Microelectronic Engineering
J.A. Todd, P. Li, et al.
Scripta Metallurgica
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TRIB 2001