Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
We present a microscopic calculation of the zone-center phonon frequencies of silicon. The electronic contributions to the phonons are fully incorporated into the dynamical matrix via the dielectric matrix G',G'. The acoustic sum rule is shown to be satisfied. © 1978 The American Physical Society.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
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SPIE Advanced Lithography 2007