Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
This paper focuses on methodology underlying the application to fault tolerant computer systems with no down communication' capability of stochastic Petri nets with general firing times. Based on a formal specification of the stochastic Petri net, we provide criteria for the marking process to be a regenerative process in continuous time with finite cycle-length moments. These results lead to strongly consistent point estimates and asymptotic confidence intervals for limiting system availability indices. We also show how the building blocks of stochastic Petri nets with general firing times facilitate the modeling of non-deterministic transition firing and illustrate the use of
interrupter input places' for graphical representation of transition interruptions.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
A.R. Gourlay, G. Kaye, et al.
Proceedings of SPIE 1989
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990