Conference paper
Electrical characterization of 3D Through-Silicon-Vias
Fei Liu, Xiaoxiong Gu, et al.
ECTC 2010
Paper
Detecting and preventing measurement errors
Abstract
Modern e-beam probers may be as convenient to use as oscilloscopes, but their measurements can be misleading or even erroneous. The author warns of potential problems and suggests ways to prevent and cure faulty readings.
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